ISO/DIS 14644-10 (withdrawn)
Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration
Publication date
2011-06
Original language
English
Title
( German
)
Reinräume und zugehörige Reinraumbereiche - Teil 10: Klassifizierung der chemischen Oberflächenreinheit
Responsible Committee
NA 041-02-21 AA - Cleanroom technology (Mirror committee CEN/TC 243 and ISO/TC 209)