Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013); German version EN ISO 14644-10:2013
Project begin
2009-05-13
WI
00243022
Planned document number
DIN EN ISO 14644-10
Abstract
This standard defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This standard is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.
For the purpose of this International Standard, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this standard does not cover the interaction between the contamination and the surface.
This standard does not include the contamination generation process and any time-dependent influences (deposition, sedimentation, ageing, etc.) or process-dependent activities such as transportation, handling, etc. Neither does it include guidance on statistical quality control techniques to ensure compliance.
Responsible Committee
NA 041-02-21 AA Cleanroom technology (Mirror committee CEN/TC 243 and ISO/TC 209)